HRXRD is a very sensitive and non destructive technique to determine the strain in thin layer materials such as electron guides or the strain induces by the second order package of SOCs. In reciprocal space mapping (RSM), it is possible to separate the elastic component of the scattered intensity from the diffuse one. As a consequence, it is possible to study diffuse scattering due to defects of the crystal lattice. As an example we show also RSM's of a high-speed SiGe pMOS structure.
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Dommann et al. (2009) studied this question.
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