Photothermal and electronic elastic effects in microelectromechanical structures

The dynamic thermoelastic and electronic deformation bending in various micromechanical systems were investigated. The elastic bending effect was investigated as a function of modulation frequency including the generation and propagation processes of the plasma, thermal, and elastic waves. The theoretical model for two microstructures (circular plate and cantilever beam) was given and the relations for dynamic elastic bending were derived. The elastic bending was calculated and analyzed for both type of microplates. This investigation is important for the analysis of the possibility to use these semiconducting optically driven microstructures as sensors and actuators.