Coplanar waveguides on BCB measured up to 760 GHz

The integrated THz pattern over any MMIC appears to be a good opportunity to enclose calibration kit suitable for accurate measurements. An original technology based on polymer has been developed. Sub-millimeter single-mode conductor-backed coplanar waveguides using benzocyclobutene polymer and interconnecting via between ground planes are processed and measured up to 760 GHz. The experimental performances show good agreement with analytical and numerical modeling. A two-tier Thru-Reflect-Line correction and a square root of Thru de-embedding are applied to extract the attenuation factor of about 3 dB/mm at 600 GHz, the relative phase velocity to light of about 0.716 and the characteristic impedance around 50 Ω. The fundamental propagating mode remains unique in this wide frequency range, enabling this technological to be integrated over existing circuit for THz applications. The loss performance of the coplanar waveguide ranges in the state-of-the-art opening the road for fully integrated THz circuits.