One of the critical components of Augmented Reality (AR) glasses is the optical waveguide. Various manufacturing methods for waveguides are currently being investigated, predominantly based on the well-established wafer-based value chain. In this study, we propose an alternative approach that combines the wafer-based value chain with the high-volume, low-cost manufacturing capabilities of large-area Roll-to-Plate (R2P) Nanoimprint Lithography (NIL). This approach demonstrates the upstream and downstream process compatibility of large-area NIL. To validate this, we developed a diffractive waveguide design featuring multi-depth slanted gratings with a 25° slant angle. This design addresses the refractive index mismatch between the substrate and the nanograting resin. We utilized multiple ultra-flat high-refractive-index glass wafers (n = 2.0) with 200mm diameter, paired with solvent free and solvent containing resins (n = 1.9). Our results showcase the scalability and quality of this method using a carrier-based imprint (Gen3 panel size, 550mm × 650mm), enabling the simultaneous imprinting of five 200mm wafers, each containing four waveguides, in a single cycle.
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Bilenberg et al. (2025) studied this question.