Linear 2D Beam Steering With a Large Focusing Grating via Focal Point Movement and Wavelength

We demonstrate a 2D beam-steering device in SiN based on a large focusing grating, achieving a steering range of <tex-math notation="LaTeX">3.2^∘ × 46^∘ </tex-math> , with discrete steps in azimuth. Despite the curved geometry, it achieves linear raster scanning. It employs only a single SiN layer and a low-resolution full etch.