Validation of contact mechanics models for Atomic Force Microscopy via Finite Elements Analysis and nanoindentation experiments

Key Points

• The aim is to validate Hertzian contact mechanics models and their corrections for analyzing force versus indentation data.
• Used finite element analysis for model validation
• Conducted nanoindentation experiments with spherical indenters
• Collected force vs indentation curves for analysis
• Validation confirms the effectiveness of Hertzian models in elastic materials
• Significant improvement observed in accuracy of force measurements
• Corrections enhance the interpretation of indentation data