Research and industrial applications of key technologies of the manufacture of electronic chemicals for chips

The chip is an important cornerstone of manufacturing power. Electronic chemicals are the core materials of chip manufacturing, wafer, lithography, etching and the whole industry chain is inseparable from high-purity electronic chemicals. In this paper, an efficient separation component, BH filler, has a unique broken line structure, and its separation performance is significantly better than that of traditional fillers. The successful industrial application has produced a variety of electronic grade chemicals represented by electronic grade dichlorodihydrosilane, and the future development prospect is discussed.