The undamped dynamic response of electrostatic MEMS switches that are driven by a step-function voltage is investigated. A systematic analysis using energy methods is presented. An analytic expression for switching time is derived and this expression may be used as a design rule for electrostatic switches. The analytic predictions are validated experimentally using test structures with parallel-plates actuators. It is shown that the analysis is also applicable for switches with more general geometry.
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Leus et al. (2008) studied this question.
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