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June 12, 2017Semiconductor Science and TechnologyOpen Access

Titanium dioxide thin films by atomic layer deposition: a review

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| openaire: EC/FP7/339478/EU//LAYERENG-HYBMAT

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Cite This Study

Niemelä et al. (2017) studied this question.

synapsesocial.com/papers/69e1d064398fe97010ad3da7 https://doi.org/10.1088/1361-6641/aa78ce

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