Plasma pretreatments create well-defined and reproducible lithium surfaces that govern TMA reactivity, leading to precursor decomposition or ALD-like Al 2 O 3 growth.
Plasma pretreatments create well-defined and reproducible lithium surfaces that govern TMA reactivity, leading to precursor decomposition or ALD-like Al 2 O 3 growth.
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Verhelle et al. (2026) studied this question.
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