Atomistic insights into EUV photoresist photolysis via full temporal dynamics

Key Points

• This research aims to explore the atomistic processes involved in the photoresist photolysis under extreme ultraviolet (EUV) light.
• Simulations based on density functional theory are employed to analyze photolysis processes.
• Temporal dynamics of the reaction are tracked to understand the mechanisms at play.
• The study uncovers how residual kinetic energy influences phenyl ring rotation during photolysis.
• The findings indicate the importance of simulating processes with density functional theory accuracy to gain deeper insights.