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March 31, 2026Journal of the Korean Institute of GasOpen Access

Systematic Classification Study on the Explosion Risk Areas when Handling Flammable Liquids in Semiconductor Gas Boxes

Bong Geun Choi Sang-Ryung Kim Tae-Sung Kim Kyu-Sun Cho

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Key Points

This research aims to classify explosion risk areas associated with handling flammable liquids in semiconductor gas boxes based on existing standards and real incident simulations.
Utilized KS C IEC 60079-10-1 standard for hazard classification.
Conducted process simulations to evaluate changes in explosion risk areas.
Analyzed previous accidents to establish comparable operational conditions.
Identified discrepancies between current standards and actual risk assessment results.
Revealed that existing methods may underestimate evaporation rates of flammable liquids.
Confirmed that systematic classification can enhance safety in gas box operations.

Implication

Systematic study examines explosion risk areas in semiconductor gas boxes, suggesting improvements for safety standards.

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Cite This Study

Choi et al. (2026) studied this question.

synapsesocial.com/papers/69fc2b158b49bacb8b347593 https://doi.org/10.7842/kigas.2026.30.1.1

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5Consequence Assessment of a 440 L Propylene Y-Cylinder Gas Cabinet in Semiconductor Gas Supply SystemsOriginal Research · 2026

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