AS-ALD of Al 2 O 3 using alkylphosphonic acid SAMs with different substituent groups is developed. The fluorinated SAM-modified Co substrates exhibit better blocking ability towards the Al 2 O 3 deposition than the nonfluorinated SAM-modified Co substrate.
No takes yet. Share an insight, caveat, or question.
Chang et al. (2021) studied this question.
Synapse has enriched 5 closely related papers on similar clinical questions. Consider them for comparative context: