Production of high-density capacitively coupled radio-frequency discharge plasma by high-secondary-electron-emission oxide

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High-density capacitively coupled radio-frequency plasma with electron density ne>1010cm−3 was produced using MgO electrodes with a high secondary-electron-emission coefficient. It was found that in the case of MgO electrodes, both plasma density and optical emission intensity were about one order of magnitude higher than those in the case of Al electrodes.