Photoreflectance (PR) spectroscopy has been used to study the built-in surface potential in GaAs epitaxial film grown by molecular beam epitaxy (MBE). The PR signal amplitude ILIR/RI sensitively depends on modulation light power, built-in surface potential and temperature. From the analysis of the modulation light power dependence of IzlR/RI, the built-in surface potential of 0.47±0.09eV was determined for a MBE-grown GaAs(lOO) epitaxial film, and the increase of the surface potential by gold deposition was observed.
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Kanata-Kito et al. (1990) studied this question.