Recent progress of Ga₂O₃ power technology: large-area devices, packaging and applications

Benefitted from progress on the large-diameter Ga 2 O 3 wafers and Ga 2 O 3 processing techniques, the Ga 2 O 3 power device technology has witnessed fast advances toward power electronics applications. Recently, reports on large-area (ampere-class) Ga 2 O 3 power devices have emerged globally, and the scope of these works have gone well beyond the bare-die device demonstration into the device packaging, circuit testing, and ruggedness evaluation. These results have placed Ga 2 O 3 in a unique position as the only ultra-wide bandgap semiconductor reaching these indispensable milestones for power device development. This paper presents a timely review on the state-of-the-art of the ampere-class Ga 2 O 3 power devices (current up to >100 A and voltage up to >2000 V), including their static electrical performance, switching characteristics, packaging and thermal management, and the overcurrent/overvoltage ruggedness and reliability. Exciting research opportunities and critical technological gaps are also discussed.