The Moore's law trajectory of hard x-ray spatial resolution extrapolates to a few nanometers within the next few years, thereby promising critical space-resolved structural, electronic, and compositional nanoscale characterizations for a wide variety of materials. This review addresses the capabilities and advantages of x-ray microbeam and nanobeam techniques compared to photon, electron, neutron, and ion probes through selected applications including semiconductors, superconductors, metals, and nanostructured devices.
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Mino et al. (2018) studied this question.
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