Spatial Distribution and Characteristics of Ozone Generation with Glow Discharge using a Double Discharge Method

For the purpose of investigating the effect of a wide discharge gap (4 mm) on ozone generation, a UV light absorption measurement technique has been used to determine the spatial distribution of ozone concentration. A glow discharge at atmospheric pressure was produced by a double discharge method with a pair of metal-to-metal electrodes. Efficient and uniform ozone generation has been accomplished. The obtained ozone concentration near the cathode is about 1.25 times higher than that at the center of the main gap. The rate constant κ 1 for O+ O 2 + Mκ 1 → O 3 + M yields the values of (2.0–2.7)×10 -34 cm 6 molecule -2 s -1 from the ozone growth curve measured using the wavelength of 254 nm.