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July 1, 1969Journal of Vacuum Science and Technology

Resistivity and Structure of Evaporated Aluminum Films

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Authors

AMA. F. MayadasIBM Research - Thomas J. Watson Research CenterRFRené FederFraunhofer Institute for Microstructure of Materials and SystemsRRR. RosenbergSUNY Polytechnic Institute

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Mayadas et al. (1969) studied this question.

synapsesocial.com/papers/6a0895807f7fcd1344dded1dhttps://doi.org/10.1116/1.1315731
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