This paper describes the motivation, packaging, and preliminary experimental results for a new passive microelectromechanical systems (MEMS)-based aeroacoustic microphone. The passive technology utilized — piezoelectric transduction, with aluminum nitride serving as the piezoelectric material — together with the small size make this microphone ideal for deployment as fuselage instrumentation in full-scale flight tests. Preliminary results show that the microphone performance characteristics exceed specifications provided by project sponsor Boeing, with a noise floor 20 kHz, and sensitivities from 32.1μV/Pa to 43.7μV/Pa.
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Williams et al. (2012) studied this question.
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