Run to Run (RTR) control uses data from past process runs to adjust settings for the next run. By making better use of existing in-line metrology and actuation capabilities, RTR control offers the potential of reducing variability in manufacturing with minimal capital cost. In this paper, we survey the types of equipment models that can be used for RTR control, compare existing RTR control algorithms, and discuss issues affecting the potential utility of RTR control.
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Musacchio et al. (2002) studied this question.
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