Robust Carbon‐Nanotube‐Based Nano‐electromechanical Devices: Understanding and Eliminating Prevalent Failure Modes Using Alternative Electrode Materials

The failure modes common to widely pursued carbon-nanotube-based nano-electromechanical systems are investigated. A fundamental understanding of the underlying mechanisms for failure and their relation to the device design space is developed through complementary in situ electromechanical characterization and dynamic multiphysics models. It is then found that the facile replacement of commonly used metal thin-film electrodes with diamondlike carbon structures leads to a dramatic improvement in reliability. This enables experimental demonstration of numerous actuation cycles without failure, and reliable application to volatile memory operations.