Energy Spectra of Low-Energy Deuterium Ions Reflected from a Two-Layer Target

The influence of electronic stopping on the energy spectra of reflected ions under the irradiation of a two-layer Ag/Si target with 1.5- and 5-keV deuterium ions is studied using computer simulation. Different dependences Se(E), where Se is the electronic-stopping cross section in silver (silicon) and E is the particle energy, are used in the calculation. For the D–Ag pair, the best agreement with the experiment is found for the results obtained by the reflection method using the TRBS computer program. It is shown that the dependence Se(E) generated by the SRIM-2013 program significantly overestimates the electronic stopping of hydrogen isotopes in Ag in the low-energy range. In this energy range, the shape of the energy spectrum depends on the interatomic potential used in the calculation. Good agreement with the experiment is obtained, in particular, for the Thomas–Fermi–Molière potential with the Lindhard screening length.