Hybrid Heterogeneous Integrated Wireless Sensor Devices with Multilayer Composite Protective Films

To realize the real-time structural health and operational safety monitoring of military and industrial devices, such as hypersonic vehicles, aero-engine blades, and thermal power plant boilers, at operating temperatures up to and beyond 1400 °C, this study presents a miniaturised, integrated, high-thermal-stability wireless sensor device. This study investigated the influence of temperature on the interdigital electrodes (IDEs) of surface acoustic wave (SAW) temperature sensors for three configurations: bare electrode, single-layer protective film, and multilayer composite film. While the exposed electrode exhibited thermal stability at 1000 °C, it underwent structural failure at 1250 °C. To achieve health monitoring at temperatures exceeding 1400 °C, an Al2O3/AlN/Al2O3 multilayer protective architecture was developed. The device demonstrated functionality up to 1400 °C with a temperature coefficient of frequency (TCF) of −40.03 ppm/°C, yielding a sensitivity of 12.0 kHz/°C at a center frequency of ~300 MHz. The electrode protection structure elevated the maximum operating temperature. A hybrid heterogeneous integration of high-temperature co-fired ceramic (HTCC) inverted-F antenna and a Langasite (LGS) SAW device with a multilayer composite film was realised. The wireless device maintained functionality from room temperature to 1400 °C and withstood 1400 °C for 2 h, exhibiting a maximum repeatability error of 12.67% (corresponding to a temperature measurement error of ~177.4 °C at 1400 °C). This integrated design enables the miniaturization of high-temperature wireless sensors, making them suitable for harsh environments.