We describe a new method for accurate large-scale capacitance calculations. The algorithm uses an integral equation formulation, but with a new representation for charge distributions that decouples charge variation from conductor geometry. This separation significantly reduces the problem size compared to a traditional discretization, resulting in a large speed increase. The full capacitance matrix of typical interconnect problems with thousands of nets can be computed in a few hours.
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Kapur et al. (2000) studied this question.