The author discusses the application of solid-state microsensors and recording microprobes in acquiring neural signals. The combination of precision photolithographic techniques afforded by integrated circuit techniques, and the exacting micromachining capabilities available in silicon enable one to implement biomedical sensors that are smaller, more reproducible, and much more capable in terms of their functionality and signal processing capabilities than their predecessors.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>
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K. Najafi (1994) studied this question.
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