The effect of the deposition parameters of nitrides of high-entropy alloys (TiZrHfVNb)N on their structure, composition, mechanical and tribological properties

Nitrides of high-entropy alloys TiZrHfVNb produced using a vacuum-arc cathode evaporation have been studied using scanning electron and atomic force microscopies, energy dispersive, Rutherford ions backscattering, and X-ray diffraction analyses, microhardness measurements, and tribological tests. It has been found that the deposition parameters affect the structure, surface morphology, distribution of elements, mechanical and tribological properties of the coatings under study.