Design of a MEMS-based motion stage based on a lever mechanism for generating large displacements and forces

Conventional miniaturized motion stages have a volume of 50–60 cm3 and a range of motion around 100 μm. Micro-electro-mechanical systems (MEMS)-based motion stages have been good alternatives in some applications for small footprint, micron-level accuracy, and a lower cost. However, existing MEMS-based motion stages are able to provide a force of μN level, small displacements (less than tens of microns), and need additional features for practical applications like a probe or a stage. In this paper, a single degree of freedom motion stage is designed and analyzed for a larger displacement, a larger output force, a smaller out-of-plane deformation, and a bigger moving stage for further applications. For these purposes, the presented motion stage is designed with a thermal actuator, folded springs, and a lever, and it is experimentally characterized. Furthermore, three different types of flexure joints are investigated to characterize their capabilities and suitability to serve as the revolute joint of the lever: a beam, a cartwheel, and a butterfly flexure. The presented motion stage has a moving stage of 15 mm × 15 mm and shows a maximum displacement over 80 μm, and out-of-plane deformation under a weight of 120 μN less than 2 μm. The force generated by the actuator is estimated to be 68.6 mN.