Fabrication of Atomically Precise Nanopores in 2D Hexagonal Boron Nitride Using Electron and Ion Beam Microscopes

Journal Article Fabrication of Atomically Precise Nanopores in 2D Hexagonal Boron Nitride Using Electron and Ion Beam Microscopes Get access Dana O Byrne, Dana O Byrne Department of Materials Science and Engineering, University of California, Berkeley, CA, USAMolecular Foundry, Lawrence Berkeley National Laboratory, CA, USA Corresponding authors: danabyrne@berkeley. edu, francesallen@berkeley. edu Search for other works by this author on: Oxford Academic Google Scholar Archana Raja, Archana Raja Molecular Foundry, Lawrence Berkeley National Laboratory, CA, USA Search for other works by this author on: Oxford Academic Google Scholar Aleksandr Noy, Aleksandr Noy Materials Science Division, Lawrence Livermore National Laboratory, CA, USASchool of Natural Sciences, University of California, Merced, CA, USA Search for other works by this author on: Oxford Academic Google Scholar Jim Ciston, Jim Ciston Molecular Foundry, Lawrence Berkeley National Laboratory, CA, USA Search for other works by this author on: Oxford Academic Google Scholar Alex Smolyanitsky, Alex Smolyanitsky Applied Chemicals and Materials Division, National Institute of Standards and Technology, Boulder, CO, USA Search for other works by this author on: Oxford Academic Google Scholar Frances I Allen Frances I Allen Department of Materials Science and Engineering, University of California, Berkeley, CA, USAMolecular Foundry, Lawrence Berkeley National Laboratory, CA, USA Corresponding authors: danabyrne@berkeley. edu, francesallen@berkeley. edu Search for other works by this author on: Oxford Academic Google Scholar Microscopy and Microanalysis, Volume 29, Issue Supplement₁, 1 August 2023, Pages 1375–1376, https: //doi. org/10. 1093/micmic/ozad067. 707 Published: 22 July 2023