(Invited) 2D Material-like Ultrathin Single-Crystal Si Nanomebranes

Ultrathin single crystal silicon with atomic scale like 2D materials offers the most promising route to create high performance electronic devices with good mechanical and optical properties. For the last decade, many examples of flexible, stretchable, and conformable electronic devices based on ultrathin silicon nanomembranes have been designed to overcome the limitations of conventional rigid semiconductor or 2D material based electronics. Ultrathin Si-based devices exhibit remarkable mechanical properties for integration onto soft substrates, and good optical transmittance in the visible range for use in transparent electronics. In this talk, I present the fabrication methods used to improve the optical and mechanical properties of single crystal Si based on a ‘top-down process’, and various kinds of transparent and foldable electronic devices enabled by ultra-thin Si nanomembranes.