The effect of multiple-layer bottom electrodes including a La 0.5 Sr 0.5 CoO 3 (LSCO) layer on the ferroelectric and electric fatigue properties of the PbZr 0.5 Ti 0.5 O 3 (PZT 50/50) thin film capacitor was investigated. Conductive LSCO thin films consisting of fine perovskite grains can be obtained at relatively low temperatures (400°C) by magnetron sputtering of the ceramic LSCO target. It is found that PZT capacitors having heterostructure electrodes such as Pt/PZT/LSCO/SiO 2 /Si and Pt/PZT/LSCO/Pt/Ti/SiO 2 /Si exhibit asymmetric hysteresis loops. These asymmetric capacitors also show fairly good fatigue endurance. Dependence of fatigue on the applied voltage will also be described.
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Im et al. (2000) studied this question.
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