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July 1, 1997Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

Testing of a rapid fault detection model for quality control: Borophosphosilicate glass thin films monitored by infrared absorption spectroscopy

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Authors

SZS. ZhangJFJames E. FrankeSandia National LaboratoriesTNThomas M. NiemczykUniversity of New Mexico

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Zhang et al. (1997) studied this question.

synapsesocial.com/papers/6a1d1992feb402ac612f2a3fhttps://doi.org/10.1116/1.589514
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