Characterization and layer thickness mapping of two-dimensional MoS₂ flakes via hyperspectral line-scanning microscopy

A micro-reflectance imaging system based on hyperspectral line-scanning microscope is developed for surface characterization and thickness mapping of two-dimensional MoS2. The hyperspectral datacube of region of interest (120 × 200 μm2) is obtained with microscale spatial resolution. Single-band quantitative analysis shows distributions of different thicknesses with wavelength variations. The excitonic peak with position around 655 nm is measured by differential reflectance analysis. Peak position mapping is employed for imaging MoS2 flakes with specific thickness and reconstructed images perform the same region of interest with high accuracy. The developed micro-reflectance imaging system has applications in laboratory analyses and industrial monitoring of 2D materials.