We have fabricated an optical pressure sensor consisting of two neighbouring Mach-Zehnder (MZ) interferometers which have the same structure and with their measurement arms running in parallel over a thin membrane. A standard plasma-enhanced chemical vapour deposition process (PECVD) was used to deposit the oxinitride waveguide and the upper cladding layer, respectively. The rib-waveguides are designed to be single-mode both for the TE and TM polarizations. Through proper design of the membrane and by measuring the optical intensity of the TE mode in one interferometer and of the TM mode in the neighbouring one, it is possible to calibrate the sensor for absolute value measurement.
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Wagner et al. (1994) studied this question.
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