124<formula formulatype="inline"><tex>^∘</tex></formula> Rotation Angle Electrothermal Micromirror With Integrated Platinum Heater

We report a single-crystal silicon (SCS)-based micromirror that is electrothermally actuated by a platinum heater integrated at the end of a thermal bimorph actuator. The mirror size is 1 mm times1 mm. A large rotation angle of 124 deg has been obtained at a dc voltage of 12.5 V. The resonant frequency of the device is 336 Hz. The radius of curvature of the mirror plate is 130 mm. A lumped circuit model has been developed for electrothermomechanical behavioral simulation and design optimization. The simulation results by the circuit model match the experimental data to within 6.9%