Failure analysis of high-density CMOS SRAMs: using realistic defect modeling and I/sub DDQ/ testing

A rapid failure analysis method for high-density CMOS static RAMs (SRAMs) that uses realistic defect modeling and the results of functional and I/sub DDQ/ testing is presented. The key to the method is the development of a defect-to-signature vocabulary through inductive fault analysis. Results indicate that the method can efficiently debug the multimegabit-memory manufacturing process.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>