Quantifying the accuracy of ellipsometer systems

As the diversity and complexity of ellipsometric applications continue to increase, so do the requirements for ellipsometric data accuracy. In the previous ICSE‐3 conference, Aspnes identified this issue, and suggested a 0.1% target for ellipsometric accuracy [1]. Unfortunately, there is no generally accepted method for characterizing or quantifying ellipsometric data accuracy. In this paper, a simple method and metric are proposed for quantifying the accuracy of an ellipsometer system. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)