Vertically integrated thin film color sensor arrays for imaging applications

Large area color sensor arrays based on vertically integrated thin-film sensors were realized. The complete color information of each color pixel is detected at the same position of the sensor array without using optical filters. The sensor arrays consist of amorphous silicon thin film color sensors integrated on top of amorphous silicon readout transistors. The spectral sensitivity of the sensors is controlled by the applied bias voltage. The operating principle of the color sensor arrays is described. Furthermore, the image quality and the pixel cross talk of the sensor arrays is analyzed by measurements of the line spread function and the modulation transfer function.