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December 1, 1983Polymer Engineering and Science

Chemical amplification in the design of dry developing resist materials

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Authors

HIHiroshi ItôCWC. Grant Willson

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Itô et al. (1983) studied this question.

synapsesocial.com/papers/6a2058d6497d35c09ae72ccbhttps://doi.org/10.1002/pen.760231807
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