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We propose a novel Cu spiral inductor with an FePt magnetic nanodot (MND) layer of FePt magnetic nanodots dispersed in SiO2 film by self-assembled nanodot desposition (SAND). We expected an increase in inductance by adopting an MND layer. Nanodot sizes ranging from 2.5 to 3.5 nm in diameter can be well controlled. By optimizing thermal annealing conditions, we formed an FePt MND film with an electromagnetic permeability of 7.7 for passive devices used in a standard radio-frequency integrated circuit (RFIC) process. The quality factors of various spiral inductors were simulated and compared with the measured quality factors of the Cu spiral inductors we fabricated. In addition, the high-frequency characteristics of Cu spiral inductors were successfully observed.
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Jeong et al. (2009) studied this question.
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