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The electromagnetic behaviour of Si-based circular spiral inductors is analysed by using a mapping onto a system of concentric rings. The corresponding field equations are solved exactly within the quasi-one-dimensional approximation. The solution is then presented as an equivalent lumped-element model where substrate RF losses are accounted for by nonlocal mutual resistances. The results are in good agreement with experimental data.
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Rejaei et al. (2002) studied this question.
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