Development of a micro electret generator prototype for energy harvesting applications is presented. MEMS-friendly perfluoropolymer, CYTOP is adopted as high-performance electret material. When corona charging is employed, charge density as large as 1.37 mC/m 2 is obtained for a 15 mm-thick CYTOP film, which is much larger than that of Teflon AF. In power generation experiments using a prototype seismic generator, maximum output power of 38 mW is obtained with 2 mm <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">p-p</inf> oscillation at 20 Hz.
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Tsutsumino et al. (2006) studied this question.
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