Accurate position control of a moving stage is achieved by employing a piezoelectric actuator associated with a multi-flexure-hinge based displacement amplifier. The principal design parameters of the amplifier are optimally determined, and its static analysis is undertaken through finite element analysis. An appropriate size amplifier is made and its performance characteristics, such as the amplification ratio, are experimentally evaluated. The amplifier is integrated with a piezostack actuator to produce a desirable working distance of the moving stage. A control system based on the Preisach model with a feed-forward compensator and a PID feedback controller is then formulated, for achieving accurate positioning of the moving stage. The feed-forward compensator is designed using the first-order descending hysteresis curves of the piezoactuator, while the PID feedback controller is designed using the signal of the error between desired and actual positions. The control system is empirically realized and control results such as the step response and sinusoidal position tracking response are evaluated in time and frequency domains.
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Choi et al. (2004) studied this question.
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