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June 4, 2026Journal of Applied Physics0 citations

Stress Analysis in Nitrogen-Doped Diamond Films from CVD Growth

Axial and shear stress in nitrogen-doped homo-epitaxial chemical-vapor-deposition diamond films

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Authors

TTTakeyuki TsujiYMY. MASUYAMATTTokuyuki Teraji

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Overview

Randomized trial examines residual stress effects in nitrogen-doped diamond films, suggesting growth conditions influence material properties.

Key Points

  • This research aims to understand how substrate inclination affects residual stress in nitrogen-doped diamond films.
  • Grew 400 μm-thick nitrogen-doped diamond films on substrates with different inclination-directions ([110] and [100]).
  • Mapped the stress tensor to analyze residual stresses along the [001] direction for both inclination-directions.
  • Measured the spin dephasing time (T2*) and dephasing rate in the CVD diamond films.
  • In samples with [110] inclination-direction, axial stress showed a strong gradient along [001].
  • In samples with [100] inclination-direction, shear stress was prevalent.
  • The T2* values were comparable: 1.25 μs for [110] and 1.26 μs for [100], indicating similar dephasing rates.

Cite This Study

Tsuji et al. (2026) studied this question.

synapsesocial.com/papers/6a211780d499ed480b1704behttps://doi.org/10.1063/5.0335363
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