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A parallel beam structure has many significant features, as follows: (i) the tip moves in parallel at the end; (ii) this structure converts a small displacement into a large strain; and (iii) when piling up this structure, each unit doesn't interfere with the other units. We used this structure for a piezoelectric vibrating gyroscope (angular rate sensor), and detected angular rate using this gyroscope. In the paper, we analyze features of the parallel beam structure by the finite element method. We show that the resonance frequency of the drive unit and sensor unit can be easily adjusted by changing the mass at the tip. From this result, this structure suits the gyroscope.
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Sato et al. (2003) studied this question.