A scanning microscope stage has been developed for use at cryogenic temperatures. The stage uses a piezoelectric driving element and circular flexure hinges to achieve a slow scan travel of greater than 10 μm and a near-resonance travel of 100 μm while immersed in liquid helium at 4.2 K. The scanner has been operated inside a pressure cell in a dilution refrigerator, where it dissipates less than 150 μW of heat at 100 mK.
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Comb et al. (1988) studied this question.
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