Application of Micro/Nanofabrication Techniques to On‐Chip Molecular Electronics

Molecular electronics is a promising subject to overcome the size limitation of silicon-based electronic devices. In the past decades, various micro/nanofabrication techniques have been developed for constructing molecular junctions, and a number of breakthroughs are made in the characterizations and applications of the single-molecule device. The history and progress are reviewed in this article, laying emphasis on the recent works on the combination of micro/nanofabrication techniques with other techniques such as electrochemical deposition and surface-enhanced Raman spectroscopy (SERS). Some prototypical single-molecule devices such as molecular transistors are presented. Finally, the challenges and prospects in the fabrication of single-molecule devices are discussed.