Ion collection by planar Langmuir probes: Sheridan’s model and its verification

Data analysis from planar Langmuir probes normally assumes that the sheath effects are not significant in determining electron density and temperature when the Debye length is small compared to the probe radius. However, analysis of ion saturation current requires careful attention due to sheath expansion near the probe electrode. It is experimentally verified for the first time that Sheridan’s numerical model [T. E. Sheridan, Phys. Plasmas 7, 3084 (2000)] provides a correct method to measure the ion saturation current for which the ion density agrees with the electron density in argon plasmas.