Key points are not available for this paper at this time.
The structure factor S (Q) of high purity amorphous Si membranes prepared by ion implantation was measured over an extended Q range (0. 03--55^-1). Calculation of the first neighbor shell coordination (C₁) as a function of maximum Q indicates that measurement of S (Q) out to at least 40^-1 is required to reliably determine the radial distribution function (RDF). A 2% change in C₁ and subtle changes in the rest of the RDF were observed upon annealing, consistent with point defect removal. After annealing at 600 ^, C₁0ex{0ex}=0ex{0ex}3. 88, which would explain why amorphous Si is less dense than crystalline Si.
Laaziri et al. (Mon,) studied this question.