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A numerical method is used to evaluate the open-circuit voltage of induced-junction solar cells as a function of substrate doping level and oxide charge. For a given oxide charge there is an optimum doping level at which VOC reaches a maximum. The equilibrium surface potential and the VOC increase with increasing oxide charge. The rate of increase, however, falls off sharply once the semiconductor surface is inverted.
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Alam et al. (1980) studied this question.
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